Catalysts
CORETECH provides advanced catalytic solutions for semiconductor exhaust systems, reducing greenhouse gases and improving thermal efficiency. Using durable materials and innovative designs, their products ensure chemical resistance, efficient air preheating, and enhanced reaction performance in demanding environments.
PFC (Perfluorinated Compounds) Catalyst
Properties
Specification
Size
Diameter: 15~16 mm
Length: 7~10 mm
Life time
1 year
Shape
Pellet
CORETECH PFC Catalyst is a high-performance catalytic product specifically designed to mitigate perfluorinated compounds (PFCs), among the most potent greenhouse gases, in exhaust streams from semiconductor manufacturing processes. This catalyst features a four-hole pellet design, optimized for enhanced efficiency. Comprised of nickel, tungsten, and alumina, it offers exceptional durability and reliable performance, making it an ideal solution for demanding applications focused on reducing greenhouse gas emissions.
Honeycomb Monolith
CORETECH Honeycomb Monolith is a robust, honeycomb-structured product designed to preheat incoming cool air, optimizing conditions for PFC gas treatment in semiconductor exhaust systems. Positioned below the catalytic layer, it functions as a regenerative heat exchanger, ensuring efficient thermal management. Its ceramic-like composition offers a highly durable, hardened surface, providing exceptional resistance to hydrofluoric acid (HF) and facilitating effective heat exchange for improved catalytic reaction efficiency.